Bird 8921SC13

5 kW, 13.56 MHz, Ultra Stable, Oil-Cooled Termination

8921SC13, SC13 Series Ultra Stable RF Termination for the Semiconductor Industry
For maximum process repeatability and consistency, modern plasma applications require precise RF power regulation and control. A key component in ensuring accurate & repeatable RF power delivery to the chamber is calibration, regulation & monitoring of the RF generator. Bird now offers ultra-stable, low VSWR loads for quick and precise measurement of generator power output when used with precision power sensors such as the Bird 4020 series.
ADVANTAGES:

• No warm-up time
• Ultra stable: Less than 0.1dB total change in VSWR from 0 to 100% rating power at 13.56 MHz
• Passive design
• Ultra-low VSWR - typically less than 1.05:1 at process critical frequencies
• Homogeneous RF design provides long-term repeatability

Bird 8921SC13 datasheet & specifications