Comdel CX-600

Power Output: 600W; Harmonic Distortion: Less than -30dBc
The CX series power supplies start at power ranges from 600 to 2500 Watts with fixed frequencies from 2 MHz to 30 MHz, and frequency agile capability up to 10% bandwidth. The solid-state design provides low cost of ownership with high reliability.

Applications:
The CX series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems, and solar photovoltaic applications.

Features:

• Standard fixed frequencies: 2 MHz, 3.39 MHz, 13.56 MHz, 27.12 MHz
• Patented S-Technology provides ultra-stable output. This stabilizing technology optimizes amplifier performance, reducing power-gain changes caused by plasma impedance fluctuations.
• ETL Marked for product safety and SEMI F47 compliant
• Local control via encoder and softkey inputs
• Standard RS-232 and analog/digital control
• Active front panel with full controls and programmable microprocessor
• Control circuitry ensures consistency during high VSWR conditions

• Power control: 0-10 VDC input for 0 to maximum-rated output
• Power control linearity: £ 2% of setting at power levels above 10% of rated power
• Frequency: Any fixed frequency from 2 to 30 MHz (optional frequency agility +/- 10% of center frequency)
• Frequency stability: 13.56 MHz +/- 0.005%

Comdel CX-600 datasheet & specifications