Comdel CPS-1001

Performance:
With millions of hours in the field, Comdel’s CPS series generators have proven their ability to withstand erratic loads. Patented S-Technology provides optimized amplifier performance for ultra-stable output by reducing power gain changes due to plasma impedance fluctuations. S-Technology helps eliminate headaches from transmission line length, mismatch conditions and process reliability issues.

Applications:
The CPS series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems.

Features:

• Solid state for long life and low maintenance
• Class “C” linear design assures stability
• ETL Marked and SEMI F47 compliant
• Control circuitry ensures consistency during high VSWR conditions
• Output transistors are beta-matched to assure reliability
• Broadband, low “Q” circuits inhibit “squeeging” and self-resonant oscillations

• Output power: 1000W
• Control I/O connector: 15-pin subminiature D type (female)
• Input line voltage: 208VAC; three phase; 50/60 Hz; 6A max.
• Cooling: Water: 1.5 GPM (5.7 liters), 35 degrees C max.
• Water connections: 1/4" NPT female, inlet & outlet
• Size: 5.25"H x 19"W x 16"D (13.3cm x 48.3cm x 40.6cm)
• Weight: 75 lbs. (34 kg)

Comdel CPS-1001 datasheet & specifications