Comdel CPS-500

Performance:
With millions of hours in the field, Comdel’s CPS series generators have proven their ability to withstand erratic loads. Patented S-Technology provides optimized amplifier performance for ultra-stable output by reducing power gain changes due to plasma impedance fluctuations. S-Technology helps eliminate headaches from transmission line length, mismatch conditions and process reliability issues.

Applications:
The CPS series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems.

Features:

• Solid state for long life and low maintenance
• Class “C” linear design assures stability
• ETL Marked and SEMI F47 compliant
• Control circuitry ensures consistency during high VSWR conditions
• Output transistors are beta-matched to assure reliability
• Broadband, low “Q” circuits inhibit “squeeging” and self-resonant oscillations

• Output power: 500W
• Control I/O connector: 15-pin subminiature D type (female)
• Input line voltage: 115/200/208/220VAC; single phase; 50/60 Hz; 1KVA max.
• Cooling: Forced air
• Size: 5.25"H x 19"W x 16"D (13.3cm x 48.3cm x 40.6cm)
• Weight: 36 lbs. (16.3 kg)

Comdel CPS-500 datasheet & specifications