Advanced Energy MDX Series DC Power Systems

MDX Series 1 kW and 1.5 kW

Tight regulation, superior arc quenching, and low stored output energy make MDX Series DC power supplies an industry leader. Intended for continuous hard use in a vacuum environment, these rugged power supplies are most commonly used as DC magnetron sputtering drives. They also offer tight regulation as bias supplies in RF sputtering and etching systems. Their compact design makes them the primary choice for laboratory systems.

Benefits:

• Tight regulation
• Improved yield
• Reduced target burn-in time
• High reliability
• Easy maintenance and replacement

Features:

• Low stored output energy
• Low ripple
• Adjustable arc suppression time
• High efficiency
• Compact design
• Voltage, current, and power regulation modes
• Front panel and analog interface control
• Full range of protection features

Advanced Energy MDX Series DC Power Systems datasheet & specifications