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Refurbished Comdel CPS-1001


Comdel CPS-1001

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Refurbished

Performance:
With millions of hours in the field, Comdel’s CPS series generators have proven their ability to withstand erratic loads. Patented S-Technology provides optimized amplifier performance for ultra-stable output by reducing power gain changes due to plasma impedance fluctuations. S-Technology helps eliminate headaches from transmission line length, mismatch conditions and process reliability issues.

Applications:
The CPS series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems.

Features:
  • Solid state for long life and low maintenance
  • Class “C” linear design assures stability
  • ETL Marked and SEMI F47 compliant
  • Control circuitry ensures consistency during high VSWR conditions
  • Output transistors are beta-matched to assure reliability
  • Broadband, low “Q” circuits inhibit “squeeging” and self-resonant oscillations

CPS 1001:
  • Output power: 1000W
  • Control I/O connector: 15-pin subminiature D type (female)
  • Input line voltage: 208VAC; three phase; 50/60 Hz; 6A max.
  • Cooling: Water: 1.5 GPM (5.7 liters), 35 degrees C max.
  • Water connections: 1/4" NPT female, inlet & outlet
  • Size: 5.25"H x 19"W x 16"D (13.3cm x 48.3cm x 40.6cm)
  • Weight: 75 lbs. (34 kg)


Comdel CPS-1001 datasheet & specifications

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